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Manufacture of MEMS structures in sealed cavity using...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Manufacture process of quartz vibrator

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Manufacturing method and integrated microstructures of...

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Manufacturing method of a MEMS structure, a cantilever-type...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Manufacturing method of a micro structure

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Manufacturing method of a microelectromechanical switch

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Manufacturing method of an acceleration sensing device

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Manufacturing method of micro-electro-mechanical device

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Manufacturing method of microelectromechanical system

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Manufacturing methods of MEMS device

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Manufacturing process of strain gauge sensor using the piezoresi

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Matrix type piezoelectric/electrostrictive device and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Membrane structures for micro-devices, micro-devices...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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MEMS based RF components with vertical motion and...

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MEMS coupler and method to form the same

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MEMS device and fabrication method thereof

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MEMS device packaging methods

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MEMS element manufacturing method

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MEMS encapsulated structure and method of making same

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MEMS passivation with phosphonate surfactants

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