Fabrication method for encapsulated micromachined structures

Fabrication method for making a planar cantilever, low...

Fabrication method of semiconductor accelerometer

Fabrication of advanced silicon-based MEMS devices

Fabrication of capacitive micromachined ultrasonic...

Fabrication of silicon micro mechanical structures

Fingerprint sensor apparatus and manufacturing method thereof

Fingerprint sensors using membrane switch arrays

Fluidic MEMS device

Fluidic MEMS device

Force-sensing transducers, accelerometers, rate sensors,...

Formation of through-wafer electrical interconnections and...

Forming a micro electro mechanical system

Frequency tunable resonant scanner and method of making

Functional device, method of manufacturing therefor and...

Fusion-bond electrical feed-through