Sacrificial layer technique to make gaps in MEMS applications
Self-aligned coating on released MEMS
Self-assemblying micro-mechanical device
Semiconductor apparatus and method for manufacturing the same
Semiconductor device and method of fabricating the same
Semiconductor device with optical sensor and method of...
Semiconductor dynamic quantity-sensor and method of...
Semiconductor dynamic sensor, and methods of transport and...
Semiconductor element holding apparatus and semiconductor...
Semiconductor integrated capacitive acceleration sensor and...
Semiconductor mechanical sensor
Semiconductor methods and structures
Semiconductor packages
Semiconductor physical quantity sensor and method for...
Semiconductor pressure detecting device and manufacturing method
Semiconductor probe with resistive tip and method of...
Semiconductor sensor with suspended microstructure and method fo
Semiconductor strain gauge and the manufacturing method
Sensor device and method of forming a sensor device
Sensor element with trenched cavity