In-plane sensor and method for making same
Infrared sensor and method of producing the same
Infrared thermopile detector system for semiconductor...
Integrated all-Si capacitive microgyro with vertical...
Integrated circuit encapsulation and method therefor
Integrated getter area for wafer level encapsulated...
Integrated large area microstructures and micromechanical...
Integrated lid formed on MEMS device
Integrated MEMS packaging
Integrated method for release and passivation of MEMS...
Integrated micro electro-mechanical system and manufacturing...
Integrated micro electro-mechanical system and manufacturing...
Integrated micromechanical sensor device and process for produci
Integrated released beam sensor for sensing acceleration and...
Integrated sensor having plurality of released beams for...
Integration manufacturing process for MEMS device
Isolated metal plug process for use in fabricating carbon...
Isolated metal plug process for use in fabricating carbon...
Isolation process for surface micromachined sensors and actuator