Acceleration sensor and process for the production thereof
Accelerometer protected by caps applied at the wafer scale
Adsorbing device, sucker and mounting device for conductive...
All-silicon monolithic motion sensor with integrated conditionin
Anchors for microelectromechanical systems having an SOI...
Anti-stiction technique for electromechanical systems and...
Anti-stiction technique for electromechanical systems and...
Anti-stiction technique for thin film and wafer-bonded...
Apparatus and methods for encapsulating...
Apparatus and methods for encapsulating...
Arrangement for measuring pressure on a semiconductor wafer...
Atomic force microscope cantilever including field effect...
Atomic force microscope cantilever including field effect...