Acceleration sensor and process for the production thereof

Accelerometer protected by caps applied at the wafer scale

Adsorbing device, sucker and mounting device for conductive...

All-silicon monolithic motion sensor with integrated conditionin

Anchors for microelectromechanical systems having an SOI...

Anti-stiction technique for electromechanical systems and...

Anti-stiction technique for electromechanical systems and...

Anti-stiction technique for thin film and wafer-bonded...

Apparatus and methods for encapsulating...

Apparatus and methods for encapsulating...

Arrangement for measuring pressure on a semiconductor wafer...

Atomic force microscope cantilever including field effect...

Atomic force microscope cantilever including field effect...

Batch manufacturing method for photovoltaic cells

Bonded wafer optical MEMS process

Bonding interface for micro-device packaging

Bonding method

Bump style MEMS switch

Cantilever sensor and fabrication method thereof

Capacitive micromachined ultrasound transducer fabricated...