Matrix type piezoelectric/electrostrictive device and...

Details Matrix type piezoelectric/electrostrictive device and... Matrix type piezoelectric/electrostrictive device and...

2007-03-20

2007-03-20

Smith, Zandra V. (Department: 2822)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S001000, C438S003000, C438S660000

Reexamination Certificate

active

10834297

ABSTRACT:
A method of making a matrix type piezoelectric/electrostrictive device having a plurality of pillar shaped piezoelectric/electrostrictive elements, each having a piezoelectric/electrostrictive substance and at least a pair of electrodes being formed on the sides of the substance, are vertically provided on a thick ceramic substrate, such that the device is driven by displacement of the piezoelectric/electrostrictive substance. In this device, the piezoelectric/electrostrictive elements are integrally bonded to the ceramic substrate and independently arranged in two dimensions. The percentage of transgranularly fractured crystal grains on at least the sides of the piezoelectric/electrostrictive substance on which the electrodes are formed is 10% or less. The unit forms a curved surface near a joined section between the substance and the substrate.

REFERENCES:
patent: 6222303 (2001-04-01), Nakamura et al.
patent: 6472799 (2002-10-01), Takeuchi et al.
patent: 6584660 (2003-07-01), Shimogawa et al.
patent: 2002/0140318 (2002-10-01), Takeuchi et al.
patent: 0 609 080 (1994-08-01), None
patent: 0 736 386 (1996-10-01), None
patent: 0 936 684 (1999-08-01), None
patent: 03-243358 (1991-10-01), None
patent: 10-278259 (1998-10-01), None
patent: 2000-168083 (2000-06-01), None
patent: 2002-257845 (2002-09-01), None
patent: 99/56500 (1999-11-01), None

Affiliated with

Also associated with

Rating

Matrix type piezoelectric/electrostrictive device and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Matrix type piezoelectric/electrostrictive device and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Matrix type piezoelectric/electrostrictive device and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3776513