MEMS passivation with phosphonate surfactants

Details MEMS passivation with phosphonate surfactants MEMS passivation with phosphonate surfactants

2005-01-05

2008-08-12

Nguyen, Tuan H (Department: 2813)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S055000, C438S064000

Reexamination Certificate

active

07410820

ABSTRACT:
Phosphonate surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirror devices. The surfactants are adsorbed from vapor or solution to form self-assembled monolayers at the device surface. The higher binding energy of the phosphonate end groups (as compared to carboxylate surfactants) improves the thermal stability of the resulting layer.

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Hanson, et. al, “Bonding Self-Assembled, Compact Organophosphonate Monolayers to the Native oxide Surface of Silicon,”J. Am. Chem. Soc.2003, 125, 16074-80.

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