Package for a micro-electro mechanical device
Package, in particular for MEMS devices and method of making...
Passivation/patterning of PZR diamond films for high temperature
Passive electrically testable acceleration and voltage...
Patterned growth of single-walled carbon nanotubes from...
Piezo-diode cantilever MEMS fabrication method
Piezoelectric device and cover sealing method and apparatus...
Piezoelectric device with sealed vibration space and...
Piezoelectric/electrostrictive film type elements and...
Piezoresistive sensing structure
Placing a MEMS part on an application platform using a guide...
Polycrystalline silicon germanium films for forming...
Pre-release plastic packaging of MEMS and IMEMS devices
Precisely defined microelectromechanical structures and...
Preloaded linear beam vibration sensor and its manufacturing met
Pressure responsive device and method of manufacturing...
Pressure sensor and manufacturing method therefor
Pressure sensor method of fabrication
Pressure transducer and manufacturing method thereof
Pressure transducer with composite diaphragm