Manufacture process of quartz vibrator

Details Manufacture process of quartz vibrator Manufacture process of quartz vibrator

1997-06-30

1999-12-07

Breneman, Bruce

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

438 53, 7351401, H01L 2100

Patent

active

059982330

ABSTRACT:
Since etching of a crotch portion of quartz vibrator defined by segment 18, first segment 13, and second segment 17 advances in accordance with the crystal orientations of quartz, the shape of side surfaces of two quartz vibrating bars opposite to each other with this crotch portion in between can be made symmetric, whereby stress applied on the two quartz vibrating bars can be equalized.

REFERENCES:
patent: 4969359 (1990-11-01), Mikkor

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