Manufacturing method of an acceleration sensing device

Details Manufacturing method of an acceleration sensing device Manufacturing method of an acceleration sensing device

2007-07-31

2008-12-02

Chapman, John E (Department: 2856)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

Reexamination Certificate

active

07459330

ABSTRACT:
An acceleration sensing device includes a movable sensing member, a frame member and a supporting member. The supporting member is coupled between the movable sensing member and the frame member so as to support the movable sensing member. The acceleration sensing device further includes a covering member disposed above the movable sensing member, with a gap between the covering member and the movable sensing member. The acceleration sensing device still further includes internal electrodes, interconnection films, external electrodes and a resin film. The internal electrodes are arranged around the covering member. The interconnection films are disposed on the frame member so as to be coupled to the internal electrodes. The external electrodes are disposed on the interconnection films. The resin film is disposed on the frame member so as to seal the covering member. Also, there is provided a manufacturing method of the acceleration sensing device.

REFERENCES:
patent: 4891984 (1990-01-01), Fujii et al.
patent: 6263735 (2001-07-01), Nakatani et al.
patent: 6316840 (2001-11-01), Otani
patent: 6925875 (2005-08-01), Silverbrook
patent: 7334476 (2008-02-01), Ichikawa
patent: 11135804 (1999-05-01), None

Affiliated with

Also associated with

Rating

Manufacturing method of an acceleration sensing device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Manufacturing method of an acceleration sensing device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Manufacturing method of an acceleration sensing device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4025511