Technique for fabricating MEMS devices having diaphragms of...

Temperature coefficient of offset adjusted semiconductor device

Thin film capacitor, method for manufacturing the same and...

Thin film getter protection

Thin film microshells incorporating a getter layer

Thin film resonator and method for manufacturing the same

Thin micromachined structures

Thin-film structure and method for manufacturing the same,...

Thin-film structure and method for manufacturing the same,...

Three dimensional thin film devices and methods of fabrication

Three-dimensional force input control device and fabrication

Three-dimensional integrated CMOS-MEMS device and process...

Three-dimensional structural body composed of silicon fine...

Transducer having a resonating silicon beam and method for formi

Transducer having a silicon diaphragm and method for forming sam

Trilayered beam MEMS device and related methods

Triple layer isolation for silicon microstructure and...