4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
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Gap tuning for surface micromachined structures in an...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Global mechanical stop

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Ground strap for suppressing stiction during MEMS fabrication

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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