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Method of forming tungsten polymetal gate having low resistance

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Method of forming U-shaped floating gate with a poly...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of forming ultra thin gate dielectric for high...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of forming ultra-shallow junctions in a semiconductor...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of forming ultra-thin silicidation-stop extensions in...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of frabricating a MOS transistor having a composite gate

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of gate etching with thin gate oxide

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of improving selectivity between silicon nitride and sili

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of improving short channel effect and gate oxide...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of improving silicide sheet resistance by implanting fluo

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of in-situ wafer cooling for a sequential WSI/alpha -Si s

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of independent P and N gate length control of FET...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of inhibiting degradation of gate oxide film

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of inhibiting metal silicide encroachment in a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of integrating high-K/metal gate in CMOS process flow

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of low angle, low energy physical vapor of alloys...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of making a bit line contact device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of making a density multiplier for semiconductor...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Method of making a dielectric for an integrated circuit

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Patent

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Method of making a doped silicon diffusion barrier region

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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