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Stepper alignment mark structure for maintaining alignment...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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STI structure and fabricating methods thereof

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Stiction-free microstructure releasing method for...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Stopper for chemical mechanical planarization, method for...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Storage-annealing plated CU interconnects

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Strained semiconductor structures

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Strained Si/SiGe layers on insulator

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Strained silicon MOSFETs having improved thermal dissipation

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Stress control of semiconductor microstructures for thin...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Stress free etch processing in combination with a dynamic...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Stress relieve pattern for damascene process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Stripper solution and method of manufacturing liquid crystal...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Stripping method

Semiconductor device manufacturing: process – Chemical etching
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Strongly textured atomic ridge nanowindows

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Structure and manufacturing method for nitride-based...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Structure and method for formation of cladded interconnects...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Structure and method for forming a thick bottom dielectric...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Structure and method for forming a trench MOSFET having...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Structure and method for forming hybrid substrate

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Structure and method for hybrid tungsten copper metal contact

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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