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Sidewall smoothing in high aspect ratio/deep etching using a...

Semiconductor device manufacturing: process – Chemical etching
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SiGe lattice engineering using a combination of oxidation,...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Silane etching process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Silicon and polycide plasma etch appplications by use of silicon

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Silicon barrier layer to prevent resist poisoning

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Silicon carbide as a stop layer in chemical mechanical...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Silicon carbide polishing method utilizing water-soluble...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Silicon chemical mechanical polish etch (CMP) stop for reduced t

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Silicon dioxide removing method

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
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Silicon etching method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Silicon focus ring and method for producing the same

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Silicon micro-machined projection with duct

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Silicon nitride etch process with critical dimension gain

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Silicon nitride etching methods

Semiconductor device manufacturing: process – Chemical etching
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Silicon nitride film with stress control

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Silicon nitride sidewall and top surface layer separating conduc

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Silicon oxide co-deposition/etching process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Silicon oxide co-deposition/etching process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Silicon oxide co-deposition/etching process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Silicon oxide removal in semiconductor processing

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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