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Integrated circuit resistant to the formation of cracks in a...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Integrated circuit waveguide

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Integrated circuit with borderless contacts

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated circuit with upstanding stylus

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated circuitry having a pair of adjacent conductive lines

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Integrated circuitry having a pair of adjacent conductive lines

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated circuits, micromechanical devices, and method of...

Semiconductor device manufacturing: process – Chemical etching
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Integrated high density plasma chemical vapor deposition...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Integrated inductor with filled etch

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Integrated method and apparatus for efficient removal of...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated method for removal of halogen residues from...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated multi-wavelength Fabry-Perot filter and method of...

Semiconductor device manufacturing: process – Chemical etching
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Integrated optical MEMS devices

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Integrated polishing and electroless deposition

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Integrated process for thin film resistors with silicides

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated process for thin film resistors with silicides

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated processing for an etch module using a hard mask techn

Semiconductor device manufacturing: process – Chemical etching
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Integrated self aligned contact etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated shallow trench isolation approach

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated vacuum and plating cluster system

Semiconductor device manufacturing: process – Chemical etching
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