Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate
2011-04-19
2011-04-19
Ha, Nathan W (Department: 2814)
Semiconductor device manufacturing: process
Chemical etching
Vapor phase etching
C257SE21215
Reexamination Certificate
active
07928012
ABSTRACT:
A stylus, an integrated circuit (IC) and method of forming the IC. The stylus extends upward from its apex and has a substantially circular cross section that decreases in diameter upward from the apex. The stylus is formed in a mold that may be formed in an orifice in a dielectric layer between wiring layers. The mold may include multiple concentric layers. For a more pronounced, non-linear stylus taper, each layer may be thinner than its next adjacent outer concentric layer.
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Horak David V.
Lam Chung H.
Alexanian Vazken
Cheung, Esq. Wan Yee
Ha Nathan W
International Business Machines - Corporation
Law Office of Charles W. Peterson, Jr.
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