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Defect-minimizing, topology-independent planarization of...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Defective semiconductor redistribution labeling system

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Defects reduction for a metal etcher

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deliberate semiconductor film variation to compensate for...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Deliberate semiconductor film variation to compensate for...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Delineation pattern for epitaxial depositions

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Delivery of dissolved ozone

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Dendritic material sacrificial layer micro-scale gap...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Deposition control of stop layer and dielectric layer for use in

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Deposition mask and method of preparing the same

Semiconductor device manufacturing: process – Chemical etching
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Deposition of an oxide layer to facilitate photoresist...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deposition of carbon into nitride layer for improved selectivity

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deposition-plasma cure cycle process to enhance film quality...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Deposition-selective etch-deposition process for dielectric...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Design of lithography alignment and overlay measurement...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Device and method for anisotropic plasma etching of a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Device and method for etching a substrate by using an...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Device and method for etching a substrate using an...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Device and method for etching nitride spacers formed upon an...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Device and method for etching spacers formed upon an integrated

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