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Integrated circuit having self-aligned CVD-tungsten/titanium...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated circuit with borderless contacts

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated circuit with upstanding stylus

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated circuitry having a pair of adjacent conductive lines

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated method and apparatus for efficient removal of...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated method for removal of halogen residues from...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated process for thin film resistors with silicides

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated process for thin film resistors with silicides

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated self aligned contact etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated shallow trench isolation approach

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integration of silicon etch and chamber cleaning processes

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Interface control for film deposition by gas-cluster...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Intermediate transfer layers for nanoscale pattern transfer...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Ion implant lithography method of processing a semiconductor...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Ion implantation to modulate amorphous carbon stress

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Ion-Ion plasma processing with bias modulation synchronized...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Iridium etchant methods for anisotropic profile

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Iridium oxide nanostructure patterning

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Iridium oxide nanotubes and method for forming same

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Isolation scheme based on recessed locos using a sloped Si etch

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