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Stacked local interconnect structure and method of...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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STI structure and fabricating methods thereof

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Stress control of semiconductor microstructures for thin...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Stress relieve pattern for damascene process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Strongly textured atomic ridge nanowindows

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Structure and method for formation of cladded interconnects...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Structure and method for forming a thick bottom dielectric...

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Structure and method for forming a trench MOSFET having...

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Structure and method for forming hybrid substrate

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Structure and method to preserve STI during etching

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Structure having flush circuit features and method of making

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Structure having recesses and projections, method of...

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Substrate etch method and device

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Substrate processing method and substrate processing apparatus

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Substrate processing system and substrate processing method

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Substrate treatment apparatus and substrate treatment method

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System and method for plasma induced modification and...

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System, method and apparatus for improved local...

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Systems and methods for electrical contacts to arrays of...

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Systems and methods for nanowire growth and harvesting

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