Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate
2007-04-10
2007-04-10
Whitehead, Jr., Carl (Department: 2813)
Semiconductor device manufacturing: process
Chemical etching
Combined with coating step
C438S778000, C438S780000, C977S753000, C977S783000, C977S932000
Reexamination Certificate
active
11015665
ABSTRACT:
Systems and methods may provide electrical contacts to an array of substantially vertically aligned nanorods. The nanorod array may be fabricated on top of a conducting layer that serves as a bottom contact to the nanorods. A top metal contact may be applied to a plurality of nanorods of the nanorod array. The contacts may allow I/V (current/voltage) characteristics of the nanorods to be measured.
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Hantschel Thomas
Johnson Noble M.
Kiesel Peter
Van De Walle Christian G.
Wong William S.
Doty Heather
Jr. Carl Whitehead
Oliff & Berridg,e PLC
Palo Alto Research Corporation Incorporated
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