Systems and methods for nanowire growth and harvesting

Details Systems and methods for nanowire growth and harvesting Systems and methods for nanowire growth and harvesting

2007-08-15

2010-02-23

Smith, Matthew (Department: 2823)

Semiconductor device manufacturing: process

Chemical etching

Combined with coating step

C438S099000, C257SE21102, C257SE51040, C977S891000

Reexamination Certificate

active

07666791

ABSTRACT:
The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrificial growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.

REFERENCES:
patent: 3218204 (1965-11-01), Ruehrwein
patent: 5196396 (1993-03-01), Lieber et al.
patent: 5252835 (1993-10-01), Lieber et al.
patent: 5274602 (1993-12-01), Glen et al.
patent: 5332910 (1994-07-01), Haraguchi et al.
patent: 5338430 (1994-08-01), Parsonage et al.
patent: 5381753 (1995-01-01), Okajima et al.
patent: 5505928 (1996-04-01), Alivisatos et al.
patent: 5512131 (1996-04-01), Kumar et al.
patent: 5640343 (1997-06-01), Gallagher et al.
patent: 5674592 (1997-10-01), Clark et al.
patent: 5690807 (1997-11-01), Clark, Jr. et al.
patent: 5751018 (1998-05-01), Alivisatos et al.
patent: 5840435 (1998-11-01), Lieber et al.
patent: 5858862 (1999-01-01), Westwater et al.
patent: 5897945 (1999-04-01), Lieber et al.
patent: 5953595 (1999-09-01), Gosain et al.
patent: 5962863 (1999-10-01), Russell et al.
patent: 5976957 (1999-11-01), Westwater et al.
patent: 5990479 (1999-11-01), Weiss et al.
patent: 5997832 (1999-12-01), Lieber et al.
patent: 6004444 (1999-12-01), Aksay et al.
patent: 6036774 (2000-03-01), Lieber et al.
patent: 6048616 (2000-04-01), Gallagher et al.
patent: 6128214 (2000-10-01), Kuekes et al.
patent: 6136156 (2000-10-01), El-Shall et al.
patent: 6159742 (2000-12-01), Lieber et al.
patent: 6190634 (2001-02-01), Lieber et al.
patent: 6207229 (2001-03-01), Bawendi et al.
patent: 6225198 (2001-05-01), Alivisatos et al.
patent: 6235675 (2001-05-01), McIlroy
patent: 6248674 (2001-06-01), Kamins et al.
patent: 6256767 (2001-07-01), Kuekes et al.
patent: 6274007 (2001-08-01), Smirnov et al.
patent: 6306736 (2001-10-01), Alivisatos et al.
patent: 6322901 (2001-11-01), Bawendi et al.
patent: 6329214 (2001-12-01), Hattori et al.
patent: 6339281 (2002-01-01), Lee et al.
patent: 6380103 (2002-04-01), Gonzalez et al.
patent: 6383923 (2002-05-01), Brown et al.
patent: 6413489 (2002-07-01), Ying et al.
patent: 6438025 (2002-08-01), Skarupo
patent: 6447663 (2002-09-01), Lee et al.
patent: 6471761 (2002-10-01), Fan et al.
patent: 6566704 (2003-05-01), Choi et al.
patent: 6586785 (2003-07-01), Flagan et al.
patent: 6760245 (2004-07-01), Eaton et al.
patent: 6773616 (2004-08-01), Chen et al.
patent: 6798000 (2004-09-01), Luyken et al.
patent: 6815218 (2004-11-01), Jacobson et al.
patent: 6815750 (2004-11-01), Kamins
patent: 6831017 (2004-12-01), Li et al.
patent: 6858455 (2005-02-01), Guillom et al.
patent: 6872645 (2005-03-01), Duan et al.
patent: 6878871 (2005-04-01), Scher et al.
patent: 6882051 (2005-04-01), Majumdar et al.
patent: 2001/0023986 (2001-09-01), Mancevski
patent: 2002/0014667 (2002-02-01), Shin et al.
patent: 2002/0117659 (2002-08-01), Lieber et al.
patent: 2002/0125192 (2002-09-01), Lopez et al.
patent: 2002/0127495 (2002-09-01), Scherer
patent: 2002/0130311 (2002-09-01), Lieber et al.
patent: 2002/0130353 (2002-09-01), Lieber et al.
patent: 2002/0158342 (2002-10-01), Tuominen et al.
patent: 2002/0163079 (2002-11-01), Awano
patent: 2002/0175408 (2002-11-01), Majumdar et al.
patent: 2003/0012723 (2003-01-01), Clarke
patent: 2003/0042562 (2003-03-01), Giebeler et al.
patent: 2003/0044777 (2003-03-01), Beattie
patent: 2003/0071246 (2003-04-01), Grigorov
patent: 2003/0089899 (2003-05-01), Lieber et al.
patent: 2003/0121887 (2003-07-01), Garvey et al.
patent: 2003/0186522 (2003-10-01), Duan et al.
patent: 2003/0189202 (2003-10-01), Li et al.
patent: 2004/0005258 (2004-01-01), Fonash et al.
patent: 2004/0026684 (2004-02-01), Empedocles
patent: 2004/0031975 (2004-02-01), Kern et al.
patent: 2004/0036126 (2004-02-01), Chau et al.
patent: 2004/0036128 (2004-02-01), Zhang et al.
patent: 2004/0061422 (2004-04-01), Avouris et al.
patent: 2004/0095658 (2004-05-01), Buretea et al.
patent: 2004/0112964 (2004-06-01), Empedocles et al.
patent: 2004/0135951 (2004-07-01), Stumbo et al.
patent: 2004/0146560 (2004-07-01), Whiteford et al.
patent: 2005/0064618 (2005-03-01), Brown et al.
patent: 2005/0066883 (2005-03-01), Dubrow et al.
patent: 2005/0079659 (2005-04-01), Duan et al.
patent: 2005/0089467 (2005-04-01), Grill et al.
patent: 2005/0133476 (2005-06-01), Islam et al.
patent: 2005/0145596 (2005-07-01), Metz et al.
patent: 2005/0266662 (2005-12-01), Yi
patent: 2005/0279274 (2005-12-01), Niu et al.
patent: 2007/0037365 (2007-02-01), Ranganath et al.
patent: 9629629 (1996-09-01), None
patent: 01003208 (2001-01-01), None
patent: 02017362 (2002-02-01), None
patent: 02048701 (2002-06-01), None
patent: 02080280 (2002-10-01), None
patent: 03085700 (2003-10-01), None
patent: 03085701 (2003-10-01), None
patent: 2004032191 (2004-04-01), None
patent: 2004032193 (2004-04-01), None
patent: 2005023923 (2005-03-01), None
Bachtold A. et al. “Logic Circuits with Carbon Nanotube Transistors” Science (2001) 294:1317-1320.
Bjork M.T. et al. “One-dimensional steeplechase for electrons realized” Nano Letters (2002) 2:86-90.
Cao Y. et al. “Growth and properties of semiconductor core/shell nanocrystals with InAs cores” J. Am. Chem. Soc. (2000) 122:9692-9702.
Chen J. et al. “Observation of a Large On-Off Ratio and Negative Differential Resistance in an Electronic Molecular Switch” Science (1999) 286:1550-1552.
Chung S-W. et al. “Silicon Nanowire Devices” App. Phys. Letts. (2000) 76(15):2068-2070.
Collier C.P. et al. “Electronically Configurable Molecular-Based Logic Gates” Science (1999) 285:391-394.
Cui Y. et al. “Doping and electrical transport in silicon nanowires” J. Phys. Chem. B (2000) 104:5213-5216.
Cui Y. et al. “Diameter-controlled synthesis of single-crystal silicon nanowires” Appl. Phys. Lett. (2001) 78:2214-2216.
Cui Y. et al. “Functional Nanoscale electronic devices assembled using silicon nanowire building blocks” Science (2001) 291:851-853.
Dabbousi B.O. et al. “(CdSe)ZnS core-shell quantum dots: Synthesis and characterization of a size series of highly luminescent nanocrysallites” J. Phys. Chem. B (1997) 101:9463-9475.
Derycke V. et al. “Carbon Nanotube Inter-and Intramolecular Logic Gates” Nano Letters (2001) 1(9):453-456.
Duan X. et al. “General synthesis of compound semiconductor nanowires” Adv. Mater. (2000) 12:298-302.
Duan X. et al. “High performance thin-film transistors using semiconductor nanowires and nanoribbons” Nature (2003) 425:274-278.
Givargizov E.I. “Fundamental Aspects of VLS Growth” J. Cryst. Growth (1975) 31:20-30.
Green L. et al. “Low-temperature wafer scale production of ZnO nanowire arrays” Angew. Chem. Int. Ed. (2003) 42:3031-3034.
Gudiksen M.S. et al “Diameter-selective synthesis of semiconductor nanowires” J. Am. Chem. Soc. (2000) 122:8801-8802.
Gudiksen M.S. et al. “Synthetic control of the diameter and length of single crystal semiconductor nanowires” J. Phys. Chem. B (2001) 105:4062-4064.
Gudiksen M.S. et al. “Growth of nanowire superlattice structures for nanoscale photonics and electronics” Nature (2002) 415:617-620.
Haraguchi K. et al. “Polarization Dependence of Ligh Emitted from GaAs p-n junctions in quantum wire crystals” J. Appl. Phys. (1994) 75(8):4220-4225.
Haraguchi K. et al. “Self Organized Fabrication of Planar GaAs Nanowhisker Arrays” Appl. Phys. Lett. (1996) 69(3):386-387.
Hiruma K. et al. “GaAs Free Standing Quantum Sized Wires” J. Appl. Phys. (1993) 74(5):3162-3171.
Huang Y. et al. “Directed Assembly of One-Dimensional Nanostructures into Functional networks” Science (2001) 291:630-633.
Huang Y. et al. “Logic Gate

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