Methods of patterning substrates

Methods of providing an adhesion layer for adhesion of...

Methods to form oxide-filled trenches

Methods to reduce the critical dimension of semiconductor...

Microelectronic device having disposable spacer

Micromechanical system fabrication method using (111) single cry

Micromechanical system fabrication method using (111) single...

Microstructure producing method capable of controlling...

Modified facet etch to prevent blown gate oxide and increase...

Modified facet etch to prevent blown gate oxide and increase...

Monolithic low dielectric constant platform for passive...

Multi-layer hard mask for deep trench silicon etch

Multi-layer interconnect with isolation layer

Multi-layer interconnect with isolation layer

Multi-purpose composite mask for dual damascene patterning

Multi-step selective etching for cross-point memory

Multiple etch method for optimizing Inter-Metal Dielectric (IMD)

Multiple etch methods for forming contact holes in microelectron