High aspect ratio etch using modulation of RF powers of...
High etch rate residue free metal etch process with low frequenc
High frequency plasma process wherein the plasma is executed by
High pressure high non-reactive diluent gas content high...
High selectivity etch using an external plasma discharge
High-density field emission elements and a method for...
High-density plasma etching of carbon-based low-k materials...
High-density plasma, organic anti-reflective coating etch...
High-frequency semiconductor wafer processing apparatus and meth
High-rate dry-etch of indium and tin oxides by hydrogen and halo
Highly selective high aspect ratio oxide etch method and product
Highly selective process for etching oxide over nitride...
Honeycomb core degreasing method
Honeycomb optical window deposition shield and method for a...
In situ plasma process to remove fluorine residues from the...
In-situ and non-intrusive method for monitoring plasma etch cham
In-situ bake step in plasma ash process to prevent corrosion
In-situ measurement of wafer position on lower electrode
Inductive plasma reactor
Inductively coupled plasma downstream strip module