Nano fabrication method for glass

Nano-tip fabrication by spatially controlled etching

Nanoimprint resist

Near substrate reactant homogenization apparatus

Near Substrate reactant Homogenization apparatus

Negative ion deductive source for etching high aspect ratio stru

Notch-free etching of high aspect SOI structures using...

Optical control interface between controller and process...

Optical emisson spectroscopy (OES) method for monitoring and con

Optical monitoring and control system and method for plasma...

Organic BARC etch process capable of use in the formation of...

Organic layer for subsequent coating with a cover layer which is

Oxide etch process using hexafluorobutadiene and related...

Oxygen plasma clean to remove carbon species deposited on a...

Pattern film repair using a focused particle beam system

Patterned coated articles and methods for producing the same

Penning discharge plasma source

Photoresist trimming process

Plasma assisted chemical transport method and apparatus

Plasma cleaning of a CVD or etch reactor using helium for plasma