Plasma assisted chemical transport method and apparatus

Details Plasma assisted chemical transport method and apparatus Plasma assisted chemical transport method and apparatus

1995-02-28

1998-09-22

Russel, Jeffrey E.

Etching a substrate: processes

Gas phase etching of substrate

Application of energy to the gaseous etchant or to the...

118723R, 156345, 427569, C23C 400, C23C 1654, H01L 2102, H05H 100

Patent

active

058110216

ABSTRACT:
A plasma assisted chemical transport system for additive or subtractive shaping of a substrate surface employs a plasma head (30) that generates a plasma (34) and is caused to scan the surface of a workpiece (51) to provide selective shaping, either by etching or depositing material. Corrosive gases of the plasma are isolated to minimize corrosive effects on the drive mechanism (20) by encompassing the plasma head within a flexible bellows (64). Scanning is in a circular path of varying radius. Acceleration induced vibrations caused by programmed varying scan velocity are avoided by use of an oppositely rotation body (56) of equal torsional inertia. Effects of linear acceleration in the radial direction are effectively avoided by making rotational scan velocity many times greater than radial scan velocity. Errors due to singularity that could exist when the scanning plasma head is at the center of its scan are kept within acceptable tolerances by stopping the scan when the center of the scanning head (30) is at a distance .DELTA.r from the center of the scan path that is equal to incremental radial steps between successive circular scan paths.

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patent: 4647512 (1987-03-01), Venkataramanan
patent: 4668366 (1987-05-01), Zarowin
patent: 4714536 (1987-12-01), Freeman et al.
patent: 5292400 (1994-03-01), Mumola
patent: 5312510 (1994-05-01), Poultney
patent: 5336335 (1994-08-01), Zarowin et al.
patent: 5382311 (1995-01-01), Ishikawa et al.
C.B. Zarowin, "Basis of Macroscopic and Microscopic Surface Shaping and Smoothing by Plasma Assisted Chemical Etching," J. Vac. Sci. Technol. B 12(6), Nov./Dec. 1994, pp. 3356-3362.
C.B. Zarowin, "Robust, Noniterative, and Computationally Efficient Modification of van Cittert Deconvolution Optical Figuring", J. Opt. Soc. Am. A, pp. 2571-2583 (1994).

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