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Apparatus for heat processing a substrate

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for making a semiconductor device in a continuous mann

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for making photovoltaic devices

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for manufacturing magnetic recording disk, and...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Apparatus for manufacturing metal layers and glow polymer layers

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for manufacturing semiconductor device

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for manufacturing semiconductor device

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for manufacturing semiconductors

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for manufacturing substrate

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Apparatus for performing at least one process on a substrate

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for perpendicular-type ultra vacuum chemical vapor...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Apparatus for processing articles in a controlled environment

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for processing semiconductor wafer comprising continuo

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for processing substrate

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for producing oxide thin film

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for producing semiconductor device

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for producing semiconductor device

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for producing semiconductors

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for producing thin film

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for reacting a semiconductor wafer with steam

Coating apparatus – Gas or vapor deposition – Multizone chamber
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