Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate
2008-02-25
2010-11-02
Moore, Karla (Department: 1716)
Coating apparatus
Gas or vapor deposition
Multizone chamber
C156S345310, C156S345320, C204S298230, C204S298250, C414S217000
Reexamination Certificate
active
07824497
ABSTRACT:
An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.
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Japanese language office action and its English language translation for corresponding Japanese application 2000024334 lists the references above.
Japanese language office action and its English language translation for corresponding Japanese application 2008193577 lists the reference above, dated Feb. 2, 2010.
Furukawa Shinji
Sasaki Hiromi
Tani Kazunori
Watabe Osamu
Watanabe Naoki
Canon Anelva Corporation
DLA Piper (LLP) US
Moore Karla
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