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Apparatus for applying a composite insulative coating to a subst

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for applying a mask to and/or removing it from a subst

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for coating cap-shaped substrates

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for coating substrate devices

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for continuous growth of SiC single crystal from SiC s

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for continuously preparing a light receiving element f

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for depositing a coating on a substrate

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for epitaxially growing semiconductor device...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Apparatus for fabricating polysilicon film for semiconductor dev

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for filling apertures in a film layer on a semiconduct

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for forming a deposited film

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for forming a deposited film of large area with the us

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus for forming a thin film

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for forming a vacuum evaporating layer on a substrate

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for forming deposited film

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for forming deposited films with microwave plasma CVD

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for forming thin film

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for gas source molecular beam epitaxy

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for gas source molecular beam epitaxy

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Apparatus for growing thin films

Coating apparatus – Gas or vapor deposition – Multizone chamber
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