Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent
1981-07-07
1983-12-27
Smith, John D.
Coating apparatus
Gas or vapor deposition
Multizone chamber
118720, 118723, 118729, 118730, 118733, 427 81, C23C 1308
Patent
active
044224060
DESCRIPTION:
BRIEF SUMMARY
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to an apparatus for manufacturing metal layers and glow polymer layers, which layers are superimposed on and arranged laterally offset with respect to one another on a substrate, which apparatus contains two vacuum chambers which are separated from one another by air locks, and which apparatus contains a cylinder having cavities in the surface thereof. The substrates are mounted on supports in the cavities and, for each cavity, a displaceable diaphragm is provided for selectively masking and providing coating of portions of the substrate. More specifically, the cylinder, together with lock jaws, forms air locks such that the supports traverse both vacuum chambers, in which, in the first chamber, an installation for the manufacture of glow polymer layers is located, and, in the second chamber, metallization installations are located for providing metal layers. Apparatus for displacing the diaphragms between the chamber for glow polymer layers and the chamber for metal layers is provided.
2. Description of the Prior Art
An apparatus of the type generally mentioned above has already been proposed in the art.
SUMMARY OF THE INVENTION
The object of the present invention is to provide that the diaphragms are brought into defined positions in relation to the substrates to be coated, in a simple manner, and that these positions are reproducible with a high degree of accuracy.
In the case of an apparatus of the type generally set forth above, the above object is achieved in that the cylinder is partially surrounded by at least one stationary curved ring, that the cylinder contains at least one impacting rod or pin which is pressed by a spring against the curved ring, that the curved ring includes recesses, that the impacting rod traverses the recesses during rotation of the cylinder, that the impacting rod is in operative connection with a device for effecting lateral displacement of the support, and that the displacement between a glow polymerization section and a metallization section, respectively, is brought about by the recesses in the curved ring.
This apparatus is relatively simply constructed, since the parts of the displacement device, which determine the amount of the displacement and its direction, are connected with the support, such that the tolerances of the cylinder are not a factor. By way of the impacting rod or pin and a ratchet wheel, a single step is always advanced in a wide range of cylinder tolerances. Moreover, the supports can be removed from the cylinder, fitted independently of the cylinder and inserted again. The reproducibility of the reciprocal position of the diaphragm and substrate is not influenced by such action. The curved rings guarantee an accurate position of the cavities relative to one another and to the remaining portions of the apparatus, such that the portion of the circumference of the cylinder, which is necessary for the diaphragm displacement, which cannot be utilized for a coating, can be kept small.
In order to manufacture layer capacitors, in which metal layers of different polarity and intermediate dielectric layers of glow polymer are to be applied, it is advantageous that the substrates be displaced relative to the diaphragm in a direction which is parallel to none of the edges of the diaphragm aperture. An all-sided reciprocal insulation of the coatings of opposite poles thereby results. During the displacement of the substrate relative to the diaphragm, on the other hand, the superposed layer structure already applied cannot be permitted to be damaged. The diaphragm is therefore clearly raised above its surroundings in the region of the glow polymer layers. On the other hand, the glow polymer layer is to be limited by a diaphragm supported on the substrate in order that tailing branches of the insulation layer cannot reach the zone of the contacting of the coatings. In order to realize these requirements, the diaphragm, at least during the glow polymerization, must be support
REFERENCES:
patent: 2432950 (1947-12-01), Turner et al.
patent: 3068510 (1962-12-01), Coleman
patent: 3312190 (1967-04-01), Bradshaw
patent: 4036171 (1977-07-01), Ramet
patent: 4294194 (1981-10-01), Behn et al.
Behn Reinhard
Kaufman Kurt
Plantz Bernard F.
Siemens Aktiengesellschaft
Smith John D.
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