Apparatus for producing semiconductor device

Details Apparatus for producing semiconductor device Apparatus for producing semiconductor device

1996-11-13

1999-08-03

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

156345, 20429825, 20429835, C23C 1600

Patent

active

059320141

ABSTRACT:
A semiconductor device producing apparatus includes a first transporter which moves a substrate to a first unit to undergo at least a first process, and a second transporter, other than the first transporter, which moves the substrate to a second unit, to undergo at least a second process.

REFERENCES:
patent: 4526670 (1985-07-01), Haji
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4969790 (1990-11-01), Petz et al.
patent: 5100502 (1992-03-01), Murdoch et al.
patent: 5286296 (1994-02-01), Sato et al.
patent: 5288379 (1994-02-01), Namiki et al.
patent: 5344542 (1994-09-01), Maher et al.
patent: 5421889 (1995-06-01), Pollock et al.

Affiliated with

Also associated with

Rating

Apparatus for producing semiconductor device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for producing semiconductor device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for producing semiconductor device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-846081