4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber
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Wafer processing architecture including load locks

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Wafer processing cluster tool batch preheating and degassing app

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Wafer transfer station for a chemical mechanical polisher

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Wafer transfer system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Work-in-process storage pod

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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