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Parylene deposition apparatus including a heated and cooled dime

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Parylene deposition apparatus including a heated and cooled supp

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Parylene deposition apparatus including a post-pyrolysis filteri

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Parylene deposition apparatus including a tapered deposition cha

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Parylene deposition apparatus including an atmospheric shroud an

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Parylene deposition apparatus including dry vacuum pump system a

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Parylene deposition chamber and method of use

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Parylene deposition chamber and method of use

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Phosphorus effusion source

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Photo-chemical vapor deposition apparatus having exchange appara

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Plasma enhanced atomic layer deposition system having...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Plasma film forming apparatus that prevents substantial irradiat

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Plasma formation of hydride compounds

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Plasma process system and method

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Plasma processing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Plasma processing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Plasma processing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Plasma processing plant

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Plasma reaction chamber with a built-in magnetic core

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Plurality of beam producing means disposed in different longitud

Coating apparatus – Gas or vapor deposition – Multizone chamber
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