4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber
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Laser sputtering apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Laser-assisted chemical vapor deposition

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Lens plasma coating system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Load lock chamber for vertical type heat treatment apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Loading lock for chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Low pressure plasma processing apparatus and method

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Low temperature integrated metallization process and apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Low-pressure processing device

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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