Apparatus for manufacturing substrate

Details Apparatus for manufacturing substrate Apparatus for manufacturing substrate

2011-03-15

2011-03-15

Moore, Karla (Department: 1712)

Coating apparatus

Gas or vapor deposition

Multizone chamber

C156S345320, C414S935000, C414S939000

Reexamination Certificate

active

07905960

ABSTRACT:
An apparatus for manufacturing a substrate includes: a transferring chamber extended along a long direction; at least one process chamber connected to the transferring chamber along the long direction; at least one load-lock chamber connected to the transferring chamber at least one side of the transferring chamber; and a transferring chamber robot moving along the long direction in the transferring chamber and transferring a substrate.

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patent: 1308565 (2001-08-01), None
patent: 1446742 (2003-10-01), None
patent: 1998-0014228 (1998-04-01), None
English Language abstract of Korean Patent Application No. 1998-0014228.

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