4. Coating apparatus
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Effusion cell assembly for epitaxial apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Electron beam physical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Enhanced vertical thermal reactor system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Enhanced vertical thermal reactor system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Evaporator

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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External isolation module

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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