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Table top parylene deposition chamber

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Tandem process chamber

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Tandem process chamber

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Tandem process chamber

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Temperature control system for semiconductor process chamber

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Temperature gradient means in reactor tube of vapor deposition a

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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TEOS-O.sub.3 oxidizing film depositing system and process for su

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Thermal post-deposition treatment of halogen-doped films to impr

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Thermal processing method and apparatus therefor

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Thermal treatment apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Thermal treatment apparatus, semiconductor device fabrication ap

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Thin film deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Thin film deposition apparatus including a vacuum transport mech

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Thin-film deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Throughput enhancement for single wafer reactor

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Transfer apparatus and accommodating apparatus for...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Treating device

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Treatment system and treatment apparatus with multi-stage carrie

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Treatment system including a plurality of treatment apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Two-compartment chamber for sequential processing

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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