Apparatus for making photovoltaic devices

Details Apparatus for making photovoltaic devices Apparatus for making photovoltaic devices

1993-05-24

1994-12-13

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

118726, 118729, 118730, C23C 1400

Patent

active

053726464

ABSTRACT:
A process and apparatus (70) for making a large area photovoltaic device (22) that is capable of generating low cost electrical power. The apparatus (70) for performing the process includes an enclosure (126) providing a controlled environment in which an oven (156) is located. At least one and preferably a plurality of deposition stations (74,76,78) provide heated vapors of semiconductor material within the oven (156) for continuous elevated temperature deposition of semiconductor material on a sheet substrate (24) including a glass sheet (26) conveyed within the oven. The sheet substrate (24) is conveyed on a roller conveyor (184) within the oven (156) and the semiconductor material whose main layer (82) is cadmium telluride is deposited on an upwardly facing surface (28) of the substrate by each deposition station from a location within the oven above the roller conveyor. A cooling station (86) rapidly cools the substrate (24) after deposition of the semiconductor material thereon to strengthen the glass sheet of the substrate.

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patent: 5016562 (1991-05-01), Madan et al.
patent: 5086729 (1992-02-01), Katagiri
P. V. Meyers, Solar Cells, vol. 27, pp. 91-98 (Oct.-Dec.).
"Harnessing Solar Power-The Photovoltaics Challenge", Chapter 11, by Ken Zweibel, Published by Plenum Press of New York and London.

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