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Vacuum vapor-deposition installation with a vacuum chamber, a va

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Vacuum vessel

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Vapor deposition system

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Vapor growth apparatus and vapor growth method capable of growin

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Vapor growth apparatus having a diffuser section containing a fl

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Vapor nozzle with gas barrier bars

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Vapor phase deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Vapor phase epitaxial growth apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Vapor-phase reaction apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Vaporized-metal cluster ion source and ionized-cluster beam depo

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Vertical batch processing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Vertical heat treatment apparatus and method of transferring...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Vertical LPCVD furnace with reversible manifold collar and metho

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Wafer processing architecture including load locks

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Wafer processing cluster tool batch preheating and degassing app

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Wafer transfer station for a chemical mechanical polisher

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Wafer transfer system

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Work-in-process storage pod

Coating apparatus – Gas or vapor deposition – Multizone chamber
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