Fusion-bond electrical feed-through

Gap tuning for surface micromachined structures in an...

Global mechanical stop

Ground strap for suppressing stiction during MEMS fabrication

Hermetic chip scale packaging means and method including...

Hermetically sealed microelectronic device and method of forming

Hermetically sealed transducers and methods for producing the sa

Heterogeneous substrate including a sacrificial layer, and a...

High performance silicon condenser microphone with...

High performance silicon condenser microphone with...

Hollow sealing structure and manufacturing method for hollow...

Hybrid cantilever and tip

In-plane sensor and method for making same

Infrared sensor and method of producing the same

Infrared thermopile detector system for semiconductor...

Integrated all-Si capacitive microgyro with vertical...

Integrated circuit encapsulation and method therefor

Integrated getter area for wafer level encapsulated...

Integrated large area microstructures and micromechanical...

Integrated lid formed on MEMS device