High performance silicon condenser microphone with...

Details High performance silicon condenser microphone with... High performance silicon condenser microphone with...

2006-11-07

2006-11-07

Blum, David S. (Department: 2813)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C381S191000

Reexamination Certificate

active

07132307

ABSTRACT:
A silicon condenser microphone is described. The silicon condenser microphone of the present invention comprises a perforated backplate comprising a portion of a single crystal silicon substrate, a support structure formed on the single crystal silicon substrate, and a floating silicon diaphragm supported at its edge by the support structure and lying parallel to the perforated backplate and separated from the perforated backplate by an air gap.

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patent: 5677965 (1997-10-01), Moret et al.
patent: 5870482 (1999-02-01), Loeppert et al.
patent: 6088463 (2000-07-01), Rombach et al.
patent: 6667189 (2003-12-01), Wang et al.
patent: 2002/0067633 (2002-06-01), Ito et al.

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