Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate
2007-02-06
2007-02-06
Lebentritt, Michael (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
C438S706000, C117S082000, C257SE21613
Reexamination Certificate
active
10731355
ABSTRACT:
A thermopile-based detector for monitoring and/or controlling semiconductor processes, and a method of monitoring and/or controlling semiconductor processes using thermopile-based sensing of conditions in and/or affecting such processes.
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Advanced Technology & Materials Inc.
Hultquist Steven J.
Intellectual Property / Technology Law
Lebentritt Michael
Shofi David
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