Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate
2006-05-16
2009-12-15
Zarneke, David A (Department: 2891)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
C438S050000, C438S053000, C257SE21502
Reexamination Certificate
active
07632698
ABSTRACT:
A device (12) may have a pressure sensitive portion (17) which is protected from corrosion by a pressure transmitting material (20). Pressure transmitting material (20) may also be used to transmit pressure to pressure sensitive portion (17). A masking material (22) may be used to define an opening (26) in encapsulating material (24).
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Heeley David E.
Hooper Stephen R.
Freescale Semiconductor Inc.
Hill Susan C.
Zarneke David A
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