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Dry etch process for small-geometry metal gates over thin...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dry etching method for semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual damascene metal interconnect structure with dielectric...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual damascene method for backened metallization using poly...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual level contacts and method for forming

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual material gate MOSFET technique

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual metal gate self-aligned integration

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual metal gate transistors for CMOS process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual salicidation process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual salicidation process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual salicides for integrated circuits

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Dual silicide semiconductor fabrication process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Edge termination in MOS transistors

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Electronic device and their manufacture

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Elimination of junction spiking using soft sputter etch and...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Elimination of void formation in aluminum based interconnect str

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Encapsulated low resistance gate structure and method for formin

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Encapsulated MOS transistor gate structures and methods for...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Enhanced electroless deposition of dielectric precursor...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Enhanced shallow junction design by polysilicon line width reduc

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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