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Method of smoothening dielectric layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Method of solving contact oblique problems of an ILD layer using

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of spin-on-glass planarization

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of stabilizing low dielectric constant films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of stress-relieving silicon oxide films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of supplying excited oxygen

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of synthesizing hybrid metal oxide materials and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of synthesizing silicon wires

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Method of treating a semi-conductor wafer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of treating a semi-conductor wafer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Method of treating a semiconductor wafer in a chamber using...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of uniform CVD

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Method of uniformly coating a substrate

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of uniformly coating a substrate

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of using a hard mask to grow dielectrics with varying cha

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of using an alloy of germanium and silicon as an antirefl

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Method to avoid threshold voltage shift in thicker...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method to cure mobile ion contamination in semiconductor process

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Method to cure mobile ion contamination in semiconductor process

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Method to deposit functionally graded dielectric films via...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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