Radiation hardened dielectric for EEPROM
Rapid acceleration methods for global planarization of...
Rapid deposition of borosilicate glass films
Rapid thermal annealing of doped polycrystalline silicon...
Rapid thermal etch and rapid thermal oxidation
Rapid thermal etch and rapid thermal oxidation
Reactive gaseous deposition precursor feed apparatus
Reactor design for reduced particulate generation
Reactor design for reduced particulate generation
Reactor for processing a workpiece using sonic energy
Reactor precoating for reduced stress and uniform CVD
Recovery of hydrophobicity of low-k and ultra low-k...
Reduced particulate etching
Reduced water adsorption for interlayer dielectric
Reducing line to line capacitance using oriented dielectric...
Reduction of black silicon in semiconductor fabrication
Reduction of charge loss in nonvolatile memory cells by phosphor
Reduction of etch-rate drift in HDP processes
Reduction of mobile ion and metal contamination in HDP-CVD chamb
Reduction of n-channel parasitic transistor leakage by using low