One-step synthesis and patterning of aligned polymer...
ONO fabrication process for increasing oxygen content at...
Optical marker layer for etch endpoint determination
Optical substrate, light emitting element, display device...
Optimal operation of conformal silica deposition reactors
Optimal operation of conformal silica deposition reactors
Organic electroluminescent display device and method of...
Organic field-effect transistor and production thereof
Organic films and a process for producing fine pattern using...
Organic semiconductor device having an active dielectric...
Organic silica-based film, method of forming the same,...
Organic silica-based film, method of forming the same,...
Organosilane CVD precursors and their use for making...
Organosilicate polymer and insulating film therefrom
Organosilicate resins as hardmasks for organic polymer...
Orientation independent oxidation of silicon
Oxidation in an ambient comprising ozone and the reaction...
Oxidation method and oxidation system
Oxidation method and oxidation system
Oxidation method for semiconductor process