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Tantalum oxide film, use thereof, process for forming the...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Technique for forming an interlayer dielectric material of...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Technique for forming an oxide/nitride layer stack by...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Techniques for improving adhesion of silicon dioxide to titanium

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Techniques for improving adhesion of silicon dioxide to...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Techniques for improving adhesion of silicon dioxide to...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Techniques for providing decoupling capacitance

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Techniques promoting adhesion of porous low K film to...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Techniques to create low K ILD for BEOL

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Technology for thermodynamically stable contacts for binary...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Temperature spike for uniform nitridization of ultra-thin...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Thermal activation of fluorine for use in a semiconductor...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Thermal compensation method for forming semiconductor...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Thermal CVD process for depositing a low dielectric constant...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Thermal nitrogen distribution method to improve uniformity...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Thermal oxidation method utilizing atomic oxygen to reduce...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Thermal processing furnace, gas delivery system therefor,...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Thermal treatment apparatus

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Thermally conductive silk-screenable interface material

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Thermally stable poly-Si/high dielectric constant material...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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