Active wafer cooling during damage engineering implant to...

Anisotropic formation process of oxide layers for vertical...

Apparatus and method for forming an oxynitride insulating...

Apparatus and method for forming an oxynitride insulating...

Apparatus and method for heat-treating semiconductor substrate

Apparatus and method for improving AC coupling on circuit...

Apparatus and method for oxidizing silicon substrates

Apparatus and process for controlling the temperature of a...

Apparatus for stabilizing high pressure oxidation of a...

Article comprising a gallium layer on a GaAs-based semiconductor

Atomic layer deposition (ALD) method with enhanced...

Barrier in gate stack for improved gate dielectric integrity

Barrier in gate stack for improved gate dielectric integrity

Biased pulse DC reactive sputtering of oxide films

Buffer layer for selective SiGe growth for uniform nucleation

Capacitor fabrication method

CMOS transistor having different PMOS and NMOS gate...

Combined preanneal/oxidation step using rapid thermal...

Controllable oxidation technique for high quality ultrathin...

Controllable oxidation technique for the formation of...